Radio Frequency Discharge Under the Effect of Magnetic Field
Abstract
In this study We tested the effects of external magnetic field (0-571 G) in dry air on the characteristic of capacitive radio discharge at 13.56MHz in a discharge chamber prepared for this purpose under different low pressure (1.0-0.05 Pascal) and different radio waves fallen. The technique which used in this study was the electrostatic probe down to see the I-V characteristic properties of this sensor to calculate the electrons energy distribution function inside the discharge system.